The Radio-Frequency Plasma Thruster (RFPT), relying on an electromagnetic coupling mechanism for plasma excitation and energy regulation, offers advantages such as high ionization efficiency, long ...

A developed high-performance 3−1/8″ coaxial two-way RF switch tailored for RF plasma discharge experiments including pre-ionization and start-up; wall conditioning and Ion Cyclotron Resonance Heating ...

As chip designs push the limits of speed, size and complexity, the semiconductor industry has set its sights on angstrom-scale device features. High-speed, precise and repeatable plasma power delivery ...

Challenges like higher selectivity and precise etching are critical for angstrom-scale IC production. Advanced RF pulsing and plasma control enhance precision in sub-nanometer processes. New impedance ...

Taking place at the end of the semiconductor process flow, dicing is the process where the silicon wafer is finally turned into individual chips, or die, traditionally by means of a saw or laser. A ...