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Through the past 30 years Hiden quadrupole mass spectrometers have addressed ever-expanding high vacuum applications at pressures ranging from 10E-3 mbar through to the UHV/XHV regimes. The products, ...
Identifying all of the important processing steps is paramount for fully characterizing a plasma process. The steps may include high vacuum preparation, backfill with reagent gases, processing step, ...
M. Schütte, H. Finke, G. Grünefeld, S. Krüger, P. Andresen, B. Stiebels, B. Stebels, B. Block, H. Meyer and W. Hentschel Single-cycle air-fuel ratio (AFR) and residual gas content of the fresh charge ...
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