Taiwan Semiconductor Manufacturing Co. evacuated factories following a 6.4 magnitude earthquake near the city of Chiayi that injured at least four people and suspended work at factories across the island’s south.

TAIPEI (Reuters) -Chipmaker TSMC said on Tuesday that all its sites were operating following an overnight 6.4 magnitude earthquake in southern Taiwan that was centred on a mountainous rural area and caused only minor damage and light injuries.

In a statement to DCD, TSMC said that as a result of the earthquake, its fabs in Taiwan’s Southern Science Park recorded a maximum seismic intensity of level 5, while fabs in Central Science Park recorded a maximum intensity of level 4 and Hsinchu Science Park fabs (including Longtan and Zhunan) recorded a maximum intensity of level 3.